Veritas SEM


The Veritas Series Scanning Electron Microscope has a major chamber and super long-axis stage (X, Y: 120 mm), making large sample analysis possible.   This SEM is optimized for productivity and persistent SEM analysis. The Veritas is the best product in the field that requires a large number of sample results for quality control.  There is no need to have complex utilities for SEM equipment operation.

Feature Highlights

Large Chamber System

Observe large areas of a sample by jointly mounting multiple samples at once. Ideal for SEM analytical applications.

Multiple Sample Starts

Internal CCD camera and navigation function. You can easily locate the sample through simultaneous mass loading of sample.

Large Stage Configuration

With five automatic long-axis stage, it's possible to analyze the movement of 120mm width / height SEM of maximum size.

Rapid Equipment Operation Management

Receive remote support by the manufacturer to check equipment status and take corrective action.

sem Specifications

Model Veritas SEM
Stage Type

5-axis Motorized
– X,Y : 120mm(-60mm ~ 60mm)– Z : 5 ~ 65mm– T : -20° ~ 90°– R : 360°

Vacuum Mode

Veritas-3000 :  X
Veritas-3100 :  O

Vacuum Mode

Veritas-3000 : High Vacuum Mode (<9×10-3Pa)
Veritas-3100 : High Vacuum Mode (<9×10-3Pa)
                           Low Vacuum Mode(10 ~ 230Pa)

Vacuum System

Fully Automated Evacuation System
– Turbo molecular pump (Vacuum ready within 3 minutes)
– Rotary vane pump
– Electrical valve system

Electron Gun

Pre-centered Tungsten Filament


Veritas-3000 : SE Detector
Veritas-3100 : SE DetectorBSE Detector (4channel, semiconductor)


Veritas-3000 : 3.0nm (SE Image at 30kV)
Veritas-3100 : 3.0nm (SE Image)
                           5.0nm (BSE Image)


x10 ~ x300,000

Acceleration Voltage

200V ~ 30kV

Objective IRIS

20 / 20 / 50 / 100μm (Variable aperture)

Image Shift


Maximum Sample Size

Horizontal : 210mmVertical : 65mm

Advanced Scan Mode

Dynamic FocusPoint & Line ScanTilt Compensation

Working Distance

0 ~ 65mm

Automatic Function

Auto Brightness & ContrastAuto FocusAuto Gun AlignmentAuto SaturationAuto FilamentBias

Image Format


Display Mode

Focus Mode : 320 x 240 pixel, Resizable
Preview Mode : 800 x 600
Slow Mode : Applicable to both preview and focus mode
Photo Mode : Up to 3200 x 2400


Installation Dimension : 2000 (W) x 800 (D)
– Main System : 800 (W) x 825 (D) x 1500 (H), 200kg
– Rotary Pump : 454 (W) x 134 (D) x 212 (H), 22kg

Supplied Accessories

Factory-centered Filament Cartridge 1box(10units)Specimen Mounts 1box(10units), TweezerCarbon TapeHex. Driver 0.89mm (1 ea.)Hex. T Wrench 2.5mm (2 ea.)

Operation Device(PC)

Windows 10-based All-in-One 21.5” Workstation100% controlled by keyboard and mouse

Optional Devices

Chamber CameraLaB6/Ceb6 upgrade 3D ImagingRaman SpectroscopyEDS(Energy Dispersive Spectroscopy)BSD(Electron Back Scattered Diffraction)WDS(Wavelength Dispersive Spectroscopy)CL(Cathodoluminescence) ImageE-beam Lithography

Power Supply

Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA

additional downloads

Veritas Application Note 16 (pdf)

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