Ion Coater

Sample Preparation

    • High space efficiency due to compact and light design
    • Fully automated operation by one button operation
    • Large-area samples can also be coated uniformly and quickly
    • Instant Coating Status Check via LED Indicator
    • Adjustable Sample Height for Optimal Positioning
    • Spacious Chamber Accommodating up to 19 Sample Holders.
    • Built-in inert gas injection port enables a variety of coating targets
    • Dual safety interlocks for high-voltage accident prevention and pump backflow prevention

sem Specifications

Model Ion Coater
Ion Coater

Vacuum Degree
1.0~2.5 × 10-1 Torr

Ion Current
10 to 70mA

Target Material
Au or Pt

Chamber Size
Φ110mm x 90mm(H)

Sample Stage
Φ90mm x 35mm(H)

Adjustable height
0~15mm

Target Size
Φ57mm ⅹ 0.1t

Sputter Time
90 to 300sec (1sec/step)

Vacuum Pump
142L/min, Rotary Pump

Dimension
Main Unit:210(W)x 305(L) x 270(H)mm, 8kg
Rotary Pump: 338 (W) x 138 (D) x 244 (H) mm, 10.4kg
Request a Demo

Request a Demo