Ion Miller

Sample Preparation

- High-quality sample preparation for SEM
- High efficiency flat milling
- Easy-to-use touch screen control (10″)
- Designed for tabletop
- Argon ion

Model

Ion Miller

EFM-10

Accelerating Voltage
0~7.5 kV

Beam Diameter
Approx. 500 ㎛

Flat Angle
20

Maximum Specimen Size
025 x H25mm (Standard) / 032 X H25mm (Option)

Swing Angle
R: 360°

Gas for Milling
Argon (99.999%)

Vacuum Pump
Turbo-molecular pump, Rotary pump

Dimension & Weight
600(W) x 600(L) x 440(H) mm / 60kg

Power Supply
AC 220 V, 50 or 60Hz (450W)

Operating Pressure
7.0 × 10^-4 (in the Chamber)

Compressed Air
3 – 5 MPa (for Shutter)

Humidity
70% or less

ECM-10

Accelerating Voltage
0-7.5 kV

Beam Diameter
Approx. 500 μm

Milling Rate
Approx. 300 pm/h (7.5 kV, si)

Maximum Specimen Size
20(W) x 18(H) x 4(D) mm, (Max. 4mm Thickness)

Stage Moving Range
X: 15 mm, Y: 10mm, Swing : 0 ~ 20°