Veritas LaB6

Big Chamber SEM

- High Resolution and Long Filament Lifetime
- Big Chamber for Highest Productivity
- Ultimate Customization
- Best solution for Semi conductor, Electronics industry

Model				Veritas LaB6
I. Electron				Resolution 2.0nm (SE Image) Electron Gun Pre-centered LaB6 Filament Acceleration Voltage 200V ~ 30kV Magnifications x10 ~ x300,000 Detector SE Detector (ET-type)
II. Stage				Stage System 5-axis Motorized　- X : 120mm \| Y : 120mm \| – Z : 5 ~ 65mm \| – T : -20° ~ 90° \| – R : 360° Working Distance 5 ~ 65mm Maximum Sample Size 210mm(D) X 65mm(H)
III. Image				Operation PC Windows11 -based All-in-One 24” Workstation Display mode Focus Mode : 320 × 240 pixel, Resizable Preview Mode : 800 × 600 Slow Mode : Applicable to both preview and focus mode Photo Mode : Up to 3200 × 2400 Format BMP,JPEG,PNG,TIFF Beam Shift 100μm Automatic Function Auto Brightness & Contrast \| Auto Focus \| Auto Gun Alignment \| Auto Saturation \| Auto Filament \| Bias
IV. Vacuum				Sample Loading Time Vacuum : 4 min, Vent : 40 sec Vacuum Mode High Vacuum only (<9×10^-3Pa) Vacuum System Fully Automated Evacuation System – Turbo molecular pump(Vacuum ready within 3 minutes) – Rotary vane pump – Electrical valve system
V. Dimensions & Power				SEM 800(W) X 825(D) X 1500(H)mm / 230kg Power supply Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA
Ⅵ. Optional Devices				Optional Devices EDS(Oxford, Bruker, EDAX, Thermo compatible) l EBSD l WDS l CL l Chamber Camera l LaB6/CeB6 Upgrade l 3D Imaging l Raman Spectroscopy l E-beam Lithography