Veritas SEM

SCANNING ELECTRON MICROSCOPE

The Veritas Series Scanning Electron Microscope has a major chamber and super long-axis stage (X, Y: 120 mm), making large sample analysis possible. This SEM is optimized for productivity and persistent SEM analysis. The Veritas is the best product in the field that requires a large number of sample results for quality control. There is no need to have complex utilities for SEM equipment operation.

Feature Highlights

Large Chamber System

Observe large areas of a sample by jointly mounting multiple samples at once. Ideal for SEM analytical applications.

Multiple Sample Starts

Internal CCD camera and navigation function. You can easily locate the sample through simultaneous mass loading of sample.

Large Stage Configuration

With five automatic long-axis stage, it's possible to analyze the movement of 120mm width / height SEM of maximum size.

Rapid Equipment Operation Management

Receive remote support by the manufacturer to check equipment status and take corrective action.

sem Specifications

Model				Veritas SEM
Stage Type				5-axis Motorized – X,Y : 120mm(-60mm ~ 60mm)– Z : 5 ~ 65mm– T : -20° ~ 90°– R : 360°
Vacuum Mode				Veritas-3000 : X Veritas-3100 : O
Vacuum Mode				Veritas-3000 : High Vacuum Mode (<9×10^-3Pa) Veritas-3100 : High Vacuum Mode (<9×10^-3Pa) Low Vacuum Mode(10 ~ 230Pa)
Vacuum System				Fully Automated Evacuation System – Turbo molecular pump (Vacuum ready within 3 minutes) – Rotary vane pump – Electrical valve system
Electron Gun				Pre-centered Tungsten Filament
Detector				Veritas-3000 : SE Detector Veritas-3100 : SE DetectorBSE Detector (4channel, semiconductor)
Resolution				Veritas-3000 : 3.0nm (SE Image at 30kV) Veritas-3100 : 3.0nm (SE Image) 5.0nm (BSE Image)
Magnification				x10 ~ x300,000
Acceleration Voltage				200V ~ 30kV
Objective IRIS				20 / 20 / 50 / 100μm (Variable aperture)
Image Shift				100μm
Maximum Sample Size				Horizontal : 210mmVertical : 65mm
Advanced Scan Mode				Dynamic FocusPoint & Line ScanTilt Compensation
Working Distance				0 ~ 65mm
Automatic Function				Auto Brightness & ContrastAuto FocusAuto Gun AlignmentAuto SaturationAuto FilamentBias
Image Format				JPGTIFFBMPPNG
Display Mode				Focus Mode : 320 x 240 pixel, Resizable Preview Mode : 800 x 600 Slow Mode : Applicable to both preview and focus mode Photo Mode : Up to 3200 x 2400
Dimension(mm)				Installation Dimension : 2000 (W) x 800 (D) – Main System : 800 (W) x 825 (D) x 1500 (H), 200kg – Rotary Pump : 454 (W) x 134 (D) x 212 (H), 22kg
Supplied Accessories				Factory-centered Filament Cartridge 1box(10units)Specimen Mounts 1box(10units), TweezerCarbon TapeHex. Driver 0.89mm (1 ea.)Hex. T Wrench 2.5mm (2 ea.)
Operation Device(PC)				Windows 10-based All-in-One 21.5” Workstation100% controlled by keyboard and mouse
Optional Devices				Chamber CameraLaB6/Ceb6 upgrade 3D ImagingRaman SpectroscopyEDS(Energy Dispersive Spectroscopy)BSD(Electron Back Scattered Diffraction)WDS(Wavelength Dispersive Spectroscopy)CL(Cathodoluminescence) ImageE-beam Lithography
Power Supply				Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA